幾何抽速Pumping speed(L/s)
30
極限壓力Ultimate pressure(Pa)
6X10-1(4.5X10-3Torr)
極限全壓力Total ultimate pressure(Pa)
2(1.5X10-2Torr)
泵轉速Pump rotary speed(r/min)
490
配帶電機Motor
功率Power(kW)
3
轉速Rotary sped(r/min)
1430
型號Model
Y100L2-4
長期運轉泵入口最大壓力Max. inlet pressure(Pa)
1.3×104
泵油Lubricated oil
牌號Model
N100真空泵油(1#真空泵油
N100 vacuum pump oil
油量Capacity (kg)
4.5
Dimension口徑
進氣Inlet(mm)
50
排氣Outlet(mm)
73
(長×寬×高)Length x width x height (mm)
565×580×1060
質(zhì)量weight (kg)
247